Product Description

APPLICATIONS
• Rapidly survey of multiple
cleanroom points at a
high flow rate
• Test filters in place
• Assure quality of inert bulk
gas supplies
• Confirm installation of
high-purity gas lines
• Verify compliance of critical
areas in electronic and
semiconductor applications
• Monitor LAF benches
• Monitor production tools

specifications︰ 2100C/2200C/3411 | Data Sheet
• 2100 6 ch: 0.1, 0.2, 0.3, 0.5, 0.7, 1.0
• 2200 6 ch :0.2, 0.3, 0.5, 0.7, 1.0, 3.0, 5.0
• Light Source: HeNe laser
• Data Storage: 400 samples
•Built-in Printer
•0.1 or 0.2 micron sensitivity at 1 cfm
•Counts 6 sizes simultaneously
•209E calculations
•FMS: Supports manifold, up to 32 ports
• Zero Count: Less than 1 count every 5 minutes

Product Image