APPLICATIONS
• Rapidly survey of multiple
cleanroom points at a
high flow rate
• Test filters in place
• Assure quality of inert bulk
gas supplies
• Confirm installation of
high-purity gas lines
• Verify compliance of critical
areas in electronic and
semiconductor applications
• Monitor LAF benches
• Monitor production tools |
|
|
|
specifications︰ | 2100C/2200C/3411 | Data Sheet • 2100 6 ch: 0.1, 0.2, 0.3, 0.5, 0.7, 1.0 • 2200 6 ch :0.2, 0.3, 0.5, 0.7, 1.0, 3.0, 5.0 • Light Source: HeNe laser • Data Storage: 400 samples •Built-in Printer •0.1 or 0.2 micron sensitivity at 1 cfm •Counts 6 sizes simultaneously •209E calculations •FMS: Supports manifold, up to 32 ports • Zero Count: Less than 1 count every 5 minutes
|
|
|
Product Image
|